DocumentCode
1081602
Title
IVA-1 single-crystal silicon TFTs on bulk glass
Author
Johnson, Noble M. ; Biegelsen, D.K. ; Tuan, H.C.
Volume
29
Issue
10
fYear
1982
fDate
10/1/1982 12:00:00 AM
Firstpage
1681
Lastpage
1682
Keywords
Crystallization; Dielectric devices; Dielectric materials; Dielectric substrates; Displays; Glass; Semiconductor films; Semiconductor thin films; Silicon on insulator technology; Thin film transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1982.20968
Filename
1482465
Link To Document