Title :
IVA-1 single-crystal silicon TFTs on bulk glass
Author :
Johnson, Noble M. ; Biegelsen, D.K. ; Tuan, H.C.
fDate :
10/1/1982 12:00:00 AM
Keywords :
Crystallization; Dielectric devices; Dielectric materials; Dielectric substrates; Displays; Glass; Semiconductor films; Semiconductor thin films; Silicon on insulator technology; Thin film transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20968
