• DocumentCode
    1081681
  • Title

    Analysis of the film thickness dependence of a single-phase unidirectional transducer using the coupling-of-modes theory and the finite-element method

  • Author

    Chen, Z.H. ; Takeuchi, M. ; Yamanouchi, K.

  • Volume
    39
  • Issue
    1
  • fYear
    1992
  • Firstpage
    82
  • Lastpage
    94
  • Abstract
    A coupling-of-modes (COM) analysis is given for the film thickness dependence of a single-phase undirectional transducer (SPUDT), while the finite-element method (FEM) is employed for evaluating all the coefficients of COM equations. The relationship between the directivity and dispersion curves of the transducer is discussed. The theoretical analysis shows that when the electrode finger thickness increases through a threshold value, a mode conversion phenomenon occurs and the value of the reflection phase changes from the positive to the negative. This result predicts that the forward direction of a film thickness difference type SPUDT will move conversely when the electrode film thickness increases through the threshold thickness. A prototype step-type SPUDT, fabricated on 128 degrees Y-X LiNbO/sub 3/ substrate, showed a directivity of 10 dB/transducer at 481.5 MHz, and a low-loss surface acoustic wave (SAW) filter showed a minimum insertion loss of 3.8 dB.<>
  • Keywords
    finite element analysis; lithium compounds; surface acoustic wave filters; ultrasonic dispersion; ultrasonic transducers; 3.8 dB; 481.5 MHz; COM equations; LiNbO/sub 3/ substrate; SPUDT; Y-X substrate; coupling-of-modes theory; directivity; dispersion curves; electrode finger thickness; film thickness dependence; finite-element method; low loss SAW filter; minimum insertion loss; mode conversion phenomenon; reflection phase; single-phase unidirectional transducer; step-type SPUDT; Dispersion; Electrodes; Equations; Fingers; Finite element methods; Optical films; Prototypes; Reflection; Surface acoustic waves; Transducers;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.166814
  • Filename
    166814