Title :
IVB-3 a submicron self-aligned GaAs MESFET technology for digital integrated circuits
Author :
Levy, H.M. ; Lee, R.E. ; Sadler, R.
fDate :
10/1/1982 12:00:00 AM
Keywords :
Digital integrated circuits; Etching; Gallium arsenide; Implants; Integrated circuit technology; Josephson junctions; MESFET integrated circuits; Optical films; Propagation delay; Resistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20977
