Title :
Modal Properties of Long-Wavelength Tunable MEMS-VCSELs With Curved Mirrors: Comparison of Experiment and Modeling
Author :
Debernardi, Pierluigi ; Kögel, Benjamin ; Zogal, Karolina ; Meissner, Peter ; Maute, Markus ; Ortsiefer, Markus ; Böhm, Gerhard ; Amann, Markus-Christian
Author_Institution :
Politec. di Torino, Turin
fDate :
4/1/2008 12:00:00 AM
Abstract :
The effective interplay of simulation and experimental results for analysis and optimization of microelectromechanical system (MEMS)-tunable vertical-cavity surface-emitting lasers (VCSELs) operating at wavelength around 1.55 mum is presented. The VCSEL combines a MEMS with concave Al-GaAs-GaAs mirror membrane and an InP-based active cavity with tunnel junction aperture in a hybrid two-chip assembly. Using electrothermal MEMS actuation the included air-gap can be expanded and the cavity resonance can be tuned to longer wavelengths. The experimental results are compared with the theoretical results provided by VELM (VCSEL ELectroMagnetic), the efficient code based on the coupled mode model and adapted for the first time to handle curved-mirror geometries. The vectorial code is found to be able to fully reproduce the experimental results, such as device tuning range, modal frequency splitting, threshold gains and modal selectivity.
Keywords :
III-V semiconductors; aluminium; gallium arsenide; indium compounds; micro-optics; micromechanical devices; surface emitting lasers; Al-GaAs-GaAs; Bragg mirrors; InP; VCSEL ELectroMagnetic; coupled mode model; curved mirror; electrothermal MEMS actuation; long-wavelength tunable MEMS-VCSEL; microelectromechanical system; tunnel junction aperture; vectorial code; vertical-cavity surface-emitting laser; Analytical models; Electromagnetic coupling; Laser modes; Laser tuning; Microelectromechanical systems; Micromechanical devices; Mirrors; Surface waves; Tunable circuits and devices; Vertical cavity surface emitting lasers; Bragg mirrors; MEMS; electromagnetic theory; tunable lasers; vertical-cavity surface-emitting laser (VCSEL);
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.2007.914773