Title :
VIA-3 measurement of interface trapped charge in short-channel MOSFETs
Author :
Russell, T.J. ; Wilson, C.L. ; Gaitan, M.
fDate :
10/1/1982 12:00:00 AM
Keywords :
Avalanche breakdown; Charge measurement; Charge pumps; Circuits; Current measurement; Electric breakdown; MOS capacitors; MOSFETs; Pollution measurement; Subthreshold current;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20999
