• DocumentCode
    1081989
  • Title

    Polyurethane rubber all-polymer artificial hair cell sensor

  • Author

    Engel, Jonathan M. ; Chen, Jack ; Liu, Chang ; Bullen, David

  • Author_Institution
    Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL
  • Volume
    15
  • Issue
    4
  • fYear
    2006
  • Firstpage
    729
  • Lastpage
    736
  • Abstract
    In this paper, we present the design, fabrication process, and preliminary testing results of an artificial hair cell (AHC) sensor made entirely of polymer materials from the substrate level up. The new AHC sensor utilizes polyurethane elastomers for sensing and structures. The AHC can detect two-axis deflection of a vertical polyurethane hair using carbon-impregnated polyurethane force sensitive resistors (FSRs). AHC with cylindrical hair cross-section exhibit sensitivity of 245 ppm resistance change for every micron (ppm/mum) of tip deflection. The AHC threshold detection level of 3 mum compares favorably with insect tactile hair cells having thresholds on the order of 30-50 mum. Furthermore, we have characterized the mechanical and chemical properties of two-part room-temperature-curing polyurethane elastomers in the context of microfabrication. Elastic properties, chemical resistance, thermal oxidative decomposition, and adhesion properties are tested and compared to the performance of polydimethylsiloxane (PDMS), a widely used elastomeric material. Polyurethane elastomer exhibit superior mechanical tear resistance and ability to adhere to substrates compared to PDMS
  • Keywords
    elastomers; micromachining; microsensors; polymers; tactile sensors; adhesion properties; artificial hair cell sensor; biomimetic; chemical properties; chemical resistance; curing; elastic properties; elastomeric material; elastomers; force sensitive resistors; insect tactile hair cells; mechanical tear resistance; microfabrication; polydimethylsiloxane; polymer materials; polyurethane rubber; thermal oxidative decomposition; Chemicals; Fabrication; Force sensors; Hair; Materials testing; Polymers; Process design; Resistors; Rubber; Thermal resistance; Artificial hair cell (AHC); biomimetic; force sensitive resistor (FSR); polymer;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2006.879373
  • Filename
    1668167