A MEMS reconfigurable DGS resonator for K-band applications

Author

Hamad, Ehab K I ; Safwat, Amr M E ; Omar, Abbas S.

Author_Institution

Magdeburg Univ.

Volume

15

Issue

4

fYear

2006

Firstpage

756

Lastpage

762

Abstract

A MEMS reconfigurable defected-ground-structure (DGS) resonator using two-dimensional (2-D) periodic DGS for coplanar waveguide (CPW) transmission line and RF MEMS series-resistive switches is proposed. The introduced MEMS reconfigurable DGS resonator has approximately a fixed bandwidth of 8.1 GHz over a wideband frequency range (K-band). The proposed structure can be designed easily for other frequency bands by changing the number of unit-cells of the 2-D PDGS. A cascaded two parallel-resonance circuit model for the MEMS reconfigurable DGS resonator has been introduced as well. The equivalent circuit parameters extraction methods have also been derived. Simulations based on the proposed circuit model are in a very good agreement with the electromagnetic (EM) simulations, which suggests that the MEMS reconfigurable DGS resonator is an inductive controlled reconfigured structure. The structure is designed in CPW environment on a high-resistivity silicon substrate. It is therefore suitable for monolithic integration with standard IC process

Keywords

coplanar transmission lines; coplanar waveguides; equivalent circuits; integrated circuit modelling; micromechanical resonators; microswitches; microwave switches; periodic structures; silicon; 2D periodic structures; 8.1 GHz; K-band applications; MEMS resonator; RF MEMS series-resistive switches; coplanar waveguide transmission line; defected ground structure resonator; electromagnetic simulations; equivalent circuit parameters extraction methods; inductive controlled reconfigured structure; parallel-resonance circuit model; reconfigurable resonator; Circuit simulation; Coplanar transmission lines; Coplanar waveguides; Electromagnetic waveguides; Frequency; K-band; Micromechanical devices; Monolithic integrated circuits; Radiofrequency microelectromechanical systems; Two dimensional displays; Circuit parameters extraction; circuit modeling; defected-ground-structure (DGS); microelectromechanical systems (MEMS) resonator; radio frequency microelectromechanical systems (RF MEMS) switches; reconfigurable resonator; two-dimensional (2-D) periodic structures;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.876797

Filename

1668170