Title :
Planar brushless magnetic micromotors
Author :
Achotte, Nicolas ; Gilles, P.-A. ; Cugat, Orphée ; Delamare, Jérôme ; Gaud, P. ; Dieppedale, C.
Author_Institution :
Lab. d´´Electrotechnique de Grenoble, Saint Martin d´´Heres
Abstract :
Novel planar magnetic micromotors and microgenerators of active diameter 8 mm were developed, delivering estimated torques of 100 muN.m at speeds in excess of 140 000 r/min. Such high performances are due to an innovative use of deep lithography and silicon etching for the fabrication of the stator coils. The hybrid design of the micromotors combines a pair of double-layer three-phase stator coils and a disc-shaped SmCo rotor with eight or 15 axial pairs of poles, all enclosed in a case fabricated using watch-industry micromachining
Keywords :
lithography; magnetic devices; micromachining; micromotors; samarium compounds; 0.8 mm; SmCo; deep lithography; microgenerators; planar brushless magnetic micromotors; shaped rotor; silicon etching; stator coils; watch industry micromachining; Analytical models; Coils; Equations; Fabrication; Micromagnetics; Micromotors; Permanent magnets; Power system modeling; Stators; Synchronous motors; High speed; MAGMAS; POWER-MEMS; magnetism; micromotors;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.872232
