DocumentCode
1082591
Title
Microchannel Pressure Measurements Using Molecular Sensors
Author
Huang, Chihyung ; Gregory, James W. ; Sullivan, John P.
Author_Institution
Purdue Univ., West Lafayette
Volume
16
Issue
4
fYear
2007
Firstpage
777
Lastpage
785
Abstract
Fluid mechanics on the microscale is an important subject for researchers who are interested in studying microdevices since physical phenomena change from macroscale to microscale. Channel flow is a fundamental topic for fluid mechanics. By using a molecular sensor known as pressure-sensitive paint (PSP), detailed pressure data can be obtained inside the microchannel and at the channel entrance. The achievable spatial resolution of the acquired pressure map can be as high as 5 mum. PSP measurements are obtained for various pressure ratios from 1.76 to 20, with Knudsen number (K n) varying from 0.003 to 0.4. Compressibility and rarefaction effects can be seen in the pressure data inside the microchannel and at the channel entrance.
Keywords
flow measurement; fluid mechanics; microchannel flow; micromechanical devices; pressure measurement; pressure sensors; channel flow; compressibility effects; fluid mechanics; microchannel pressure measurements; molecular sensors; pressure-sensitive paint; rarefaction effects; Aerospace engineering; Costs; Extraterrestrial measurements; Fluid flow measurement; Microchannel; Microelectromechanical devices; Micromechanical devices; Paints; Pressure measurement; Sensor phenomena and characterization; Fluid flow measurement; microchannel; microsensors; pressure-sensitive paint (PSP);
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2007.892914
Filename
4285638
Link To Document