• DocumentCode
    1082591
  • Title

    Microchannel Pressure Measurements Using Molecular Sensors

  • Author

    Huang, Chihyung ; Gregory, James W. ; Sullivan, John P.

  • Author_Institution
    Purdue Univ., West Lafayette
  • Volume
    16
  • Issue
    4
  • fYear
    2007
  • Firstpage
    777
  • Lastpage
    785
  • Abstract
    Fluid mechanics on the microscale is an important subject for researchers who are interested in studying microdevices since physical phenomena change from macroscale to microscale. Channel flow is a fundamental topic for fluid mechanics. By using a molecular sensor known as pressure-sensitive paint (PSP), detailed pressure data can be obtained inside the microchannel and at the channel entrance. The achievable spatial resolution of the acquired pressure map can be as high as 5 mum. PSP measurements are obtained for various pressure ratios from 1.76 to 20, with Knudsen number (K n) varying from 0.003 to 0.4. Compressibility and rarefaction effects can be seen in the pressure data inside the microchannel and at the channel entrance.
  • Keywords
    flow measurement; fluid mechanics; microchannel flow; micromechanical devices; pressure measurement; pressure sensors; channel flow; compressibility effects; fluid mechanics; microchannel pressure measurements; molecular sensors; pressure-sensitive paint; rarefaction effects; Aerospace engineering; Costs; Extraterrestrial measurements; Fluid flow measurement; Microchannel; Microelectromechanical devices; Micromechanical devices; Paints; Pressure measurement; Sensor phenomena and characterization; Fluid flow measurement; microchannel; microsensors; pressure-sensitive paint (PSP);
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2007.892914
  • Filename
    4285638