Title :
VCSELs with monolithic coupling to internal horizontal waveguides using integrated diffraction gratings
Author :
Louderback, D.A. ; Pickrell, G.W. ; Lin, H.C. ; Fish, M.A. ; Hindi, J.J. ; Guilfoyle, P.S.
Author_Institution :
OptiComp Corp., Zephyr Cove, NV, USA
Abstract :
A VCSEL structure with output coupling to an internal waveguide using integrated diffraction gratings has been demonstrated. The design and fabrication of the monolithically integrated structure, including epitaxial regrowth, is discussed and initial device characteristics are presented. While horizontal waveguides can be used to route optical signals between monolithically integrated components, a small amount of transmission is retained in the top DBR to enable on-wafer testing. This monolithic structure has the potential to enable VCSEL-based photonic integrated circuits on GaAs.
Keywords :
III-V semiconductors; aluminium compounds; distributed Bragg reflector lasers; gallium arsenide; integrated circuit design; integrated optoelectronics; monolithic integrated circuits; semiconductor lasers; surface emitting lasers; waveguide lasers; AlGaAs; DBR; GaAs; GaAs substrate; VCSEL-based photonic integrated circuits; epitaxial regrowth; integrated diffraction gratings; internal horizontal waveguides; monolithic coupling; monolithically integrated structure design; monolithically integrated structure fabrication; wafer testing;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20045585
