VCSELs with monolithic coupling to internal horizontal waveguides using integrated diffraction gratings

Author

Louderback, D.A. ; Pickrell, G.W. ; Lin, H.C. ; Fish, M.A. ; Hindi, J.J. ; Guilfoyle, P.S.

Author_Institution

OptiComp Corp., Zephyr Cove, NV, USA

Volume

40

Issue

17

fYear

2004

Firstpage

1064

Lastpage

1065

Abstract

A VCSEL structure with output coupling to an internal waveguide using integrated diffraction gratings has been demonstrated. The design and fabrication of the monolithically integrated structure, including epitaxial regrowth, is discussed and initial device characteristics are presented. While horizontal waveguides can be used to route optical signals between monolithically integrated components, a small amount of transmission is retained in the top DBR to enable on-wafer testing. This monolithic structure has the potential to enable VCSEL-based photonic integrated circuits on GaAs.

Keywords

III-V semiconductors; aluminium compounds; distributed Bragg reflector lasers; gallium arsenide; integrated circuit design; integrated optoelectronics; monolithic integrated circuits; semiconductor lasers; surface emitting lasers; waveguide lasers; AlGaAs; DBR; GaAs; GaAs substrate; VCSEL-based photonic integrated circuits; epitaxial regrowth; integrated diffraction gratings; internal horizontal waveguides; monolithic coupling; monolithically integrated structure design; monolithically integrated structure fabrication; wafer testing;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20045585

Filename

1327526