Calibration of sampling oscilloscopes with high-speed photodiodes

We calibrate the magnitude and phase response of equivalent-time sampling oscilloscopes to 110 GHz. We use a photodiode that has been calibrated with our electrooptic sampling system as a reference input pulse source to the sampling oscilloscope. We account for the impedance of the oscilloscope and the reference photodiode and correct for electrical reflections and distortions due to impedance mismatch. We also correct for time-base imperfections such as drift, time-base distortion, and jitter. We have performed a rigorous uncertainty analysis, which includes a Monte Carlo simulation of time-domain error sources combined with error sources from the deconvolution of the photodiode pulse, from the mismatch correction, and from the jitter correction