DocumentCode
1083918
Title
A high-voltage Zener diode with an array structure
Author
Edwards, D.G. ; Grossman, W.D.
Author_Institution
Siemens Corp., Princeton, NJ
Volume
3
Issue
10
fYear
1982
fDate
10/1/1982 12:00:00 AM
Firstpage
312
Lastpage
314
Abstract
A design for a high-voltage Zener diode which employs a technology similar to that used for power MOS transistors is presented. Device performance is improved by patterning the device anode to create an array of small p+regions which are connected in parallel to form a composite Zener diode. Results from fabricated devices have verified that the design concept is valid for devices in the voltage range above 400 V, and have provided information on the optimum device geometry.
Keywords
Anodes; Breakdown voltage; Diodes; Doping; Electric breakdown; Epitaxial layers; Information geometry; Joining processes; MOSFETs; Temperature;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1982.25581
Filename
1482686
Link To Document