Title :
Self-Referenced Residual Pressure Measurement Method for Fiber-Optic Pressure Sensor Chip
Author :
Jinde Yin ; Tiegen Liu ; Junfeng Jiang ; Kun Liu ; Shuang Wang ; Shengliang Zou ; Zunqi Qin ; Zhenyang Ding
Author_Institution :
Key Lab. of Optoelectron. Inf. Technol., Tianjin Univ., Tianjin, China
Abstract :
We propose a direct and nondestructive self-referenced residual pressure measurement method for MEMS chip of fiber-optic pressure sensor. In the proposed method, two multimode fibers are placed at the center and the edge position of the sealed cavity. With scanning external pressure, two groups of cavity lengths data are obtained by using polarization low-coherence interference demodulator. The intersection point of their linear fitting curves indicates that the diaphragm is in flat condition and residual pressure is determined by the external pressure at this point. We successfully demonstrated the effectiveness of the residual pressure measurement method with measure error 0.049 kPa.
Keywords :
curve fitting; fibre optic sensors; micro-optomechanical devices; microcavities; microsensors; nondestructive testing; optical modulation; pressure measurement; pressure sensors; MEMS chip; cavity length data; diaphragm; direct self-referenced residual pressure measurement method; fiber-optic pressure sensor chip; flat condition; intersection point; linear fitting curves; multimode fibers; nondestructive self-referenced residual pressure measurement method; polarization low-coherence interference demodulator; pressure 0.049 kPa; scanning external pressure; sealed cavity center; sealed cavity edge position; Cavity resonators; Micromechanical devices; Optical fiber polarization; Optical fiber sensors; Pressure measurement; Semiconductor device measurement; Fiber-optic pressure sensors; Low-coherence interference; MEMS chip; Residual pressure; fiber-optic pressure sensors; low-coherence interference; residual pressure;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2014.2307346
