Title :
Simple formulas for two- and three-dimensional capacitances
Author :
Sakurai, T. ; Tamaru, K.
Author_Institution :
Toshiba Research and Development Center, Kawasaki, Japan
fDate :
2/1/1983 12:00:00 AM
Abstract :
This paper proposes simple formulas for wiring capacitances in VLSI, including two- and/or three-dimensional effects. The accuracy of these formulas are practically sufficient for a wide range of wire thickness, wire width, and interwire spacing.
Keywords :
Capacitance; Circuits; Dielectric constant; Dielectrics and electrical insulation; Numerical analysis; Research and development; Silicon; Very large scale integration; Wire; Wiring;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21093
