DocumentCode
1084746
Title
Simple formulas for two- and three-dimensional capacitances
Author
Sakurai, T. ; Tamaru, K.
Author_Institution
Toshiba Research and Development Center, Kawasaki, Japan
Volume
30
Issue
2
fYear
1983
fDate
2/1/1983 12:00:00 AM
Firstpage
183
Lastpage
185
Abstract
This paper proposes simple formulas for wiring capacitances in VLSI, including two- and/or three-dimensional effects. The accuracy of these formulas are practically sufficient for a wide range of wire thickness, wire width, and interwire spacing.
Keywords
Capacitance; Circuits; Dielectric constant; Dielectrics and electrical insulation; Numerical analysis; Research and development; Silicon; Very large scale integration; Wire; Wiring;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21093
Filename
1482994
Link To Document