Title :
Empirical relation of margin to gap and linewidth in AC plasma panel
Author :
Hairabedian, Barry
Author_Institution :
IBM Corporation, Kingston, NY
fDate :
5/1/1983 12:00:00 AM
Abstract :
The method and results of second order multivariable regression analysis on a large sample of panels are presented. Plots relate margin to gap, linewidth, and manufacturing tolerances within a panel.
Keywords :
Argon; Conductors; Dielectric measurements; Plasmas; Pollution measurement; Regression analysis; Surface contamination; Testing; Voltage; Writing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21144
