Title :
Promise and challenge of thin-film silicon approaches to active matrices
Author :
Lakatos, Andras I.
Author_Institution :
Xerox Corporation, Webster, NY
fDate :
5/1/1983 12:00:00 AM
Abstract :
This paper reviews the state of the art of laser-annealed crystalline, amorphous, and small-grained polycrystalline Si thin-film transistor arrays built for the addressing of liquid-crystal displays. The fabrication and performance of these arrays are compared with each other and with the more traditional CdSe-type device arrays.
Keywords :
Capacitance; Fabrication; Liquid crystal displays; Optical arrays; Semiconductor diodes; Semiconductor thin films; Silicon; Switches; Thin film transistors; Varistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21161
