• DocumentCode
    1085460
  • Title

    128 × 128 deformable mirror device

  • Author

    Hornbeck, Larry J.

  • Author_Institution
    Texas Instruments Inc., Dallas, TX
  • Volume
    30
  • Issue
    5
  • fYear
    1983
  • fDate
    5/1/1983 12:00:00 AM
  • Firstpage
    539
  • Lastpage
    545
  • Abstract
    The deformable mirror device (DMD) is an X-Y array of deformable mirror elements addressed by an underlying array of MOS transistors. Applications include optical information processing and projection displays. The architecture, operation, and experimental results are presented for a 128 × 128 DMD.
  • Keywords
    Circuits; Crystalline materials; Delay; Liquid crystals; Magnetic materials; Mirrors; Optical materials; Optical modulation; Silicon; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21163
  • Filename
    1483064