DocumentCode
1085460
Title
128 × 128 deformable mirror device
Author
Hornbeck, Larry J.
Author_Institution
Texas Instruments Inc., Dallas, TX
Volume
30
Issue
5
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
539
Lastpage
545
Abstract
The deformable mirror device (DMD) is an
array of deformable mirror elements addressed by an underlying array of MOS transistors. Applications include optical information processing and projection displays. The architecture, operation, and experimental results are presented for a 128 × 128 DMD.
array of deformable mirror elements addressed by an underlying array of MOS transistors. Applications include optical information processing and projection displays. The architecture, operation, and experimental results are presented for a 128 × 128 DMD.Keywords
Circuits; Crystalline materials; Delay; Liquid crystals; Magnetic materials; Mirrors; Optical materials; Optical modulation; Silicon; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21163
Filename
1483064
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