• DocumentCode
    1085537
  • Title

    SEM-EBIC and traveling light spot diffusion length measurements: Normally irradiated charge-collecting diode

  • Author

    Ioannou, Dimitris E. ; Gledhill, Richard J.

  • Author_Institution
    Middlesex Polytechnic, London, England
  • Volume
    30
  • Issue
    6
  • fYear
    1983
  • fDate
    6/1/1983 12:00:00 AM
  • Firstpage
    577
  • Lastpage
    580
  • Abstract
    An analysis of the induced current in a normally irradiated diode by monochromatic light or a SEM electron beam is given, which can be used to determine the diffusion length. Two light sources are considered: a traveling light spot and uniform illumination with part of the sample containing the diode shadowed by a knife-edge mask. The diffusion length is determined by readily computed numerical calculations.
  • Keywords
    Artificial intelligence; Current measurement; Electron beams; Equations; Length measurement; Light sources; Lighting; Numerical analysis; Scanning electron microscopy; Semiconductor diodes;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21171
  • Filename
    1483072
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1085537