• DocumentCode
    1085839
  • Title

    Mathematical implementation of segregation model for two-dimensional process simulation

  • Author

    Seidl, Albert

  • Author_Institution
    Technische Universität München, Munich, Germany
  • Volume
    30
  • Issue
    6
  • fYear
    1983
  • fDate
    6/1/1983 12:00:00 AM
  • Firstpage
    722
  • Lastpage
    723
  • Abstract
    In diffusion models including oxidation, the form of the boundary condition is usually fixed by the segregation model. Papers published on two-dimensional process simulation [2] - [5] have used different boundary conditions for the same underlying segregation model. In this brief a boundary condition is derived and terms neglected by cited authors are discussed.
  • Keywords
    Boundary conditions; Elasticity; Equations; Impurities; Lead compounds; Mathematical model; Oxidation; Silicon; Two dimensional displays; Viscosity;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21199
  • Filename
    1483100
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1085839