DocumentCode :
1085868
Title :
Laser annealing and crystallization of silicon
Author :
Celler, G.
Author_Institution :
Bell Labs., Murray Hill, NJ USA
Volume :
17
Issue :
12
fYear :
1981
fDate :
12/1/1981 12:00:00 AM
Firstpage :
2446
Lastpage :
2448
Keywords :
Annealing; Crystallization; Current measurement; Magnetic field measurement; Plasma density; Plasma measurements; Plasma waves; Scattering; Silicon; Tokamaks;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.1981.1070888
Filename :
1070888
Link To Document :
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