DocumentCode

1085868

Title

Laser annealing and crystallization of silicon

Author

Celler, G.

Author_Institution

Bell Labs., Murray Hill, NJ USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2446

Lastpage

2448

Keywords

Annealing; Crystallization; Current measurement; Magnetic field measurement; Plasma density; Plasma measurements; Plasma waves; Scattering; Silicon; Tokamaks;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070888

Filename

1070888