Title :
Pulsed UV laser photochemical doping of semiconductors
Author :
Deutsch, T. ; Ehrlich, D. ; Turner, Greg ; Fan, Jintao ; Osgood, R.
Author_Institution :
MIT, Lincoln Laboratory, Lexington, MA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Compressors; Electrons; Gas lasers; Laboratories; Laser fusion; Optical pulses; Photochemistry; Pulse compression methods; Semiconductor device doping; Semiconductor lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070933
