Title :
A multigrid method for solution of the diffusion equation in VLSI process modeling
Author_Institution :
Institut für Festkörpertechnologie, München, Germany
fDate :
9/1/1983 12:00:00 AM
Abstract :
If an implicit time discretization method is used for the diffusion equation, a large equation system has to be solved. In this work, a ν-cycle multigrid method was employed for this purpose. It can be easily applied to any 9-point approximation for nonlinear second-order differential operators, requires no iteration parameters, and can compete with other fast solvers [7]. The storage needed is 6 times the number of grid points.
Keywords :
Arithmetic; Boundary conditions; Gaussian processes; Helium; Multigrid methods; Nonlinear equations; Oxidation; Poisson equations; Silicon; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21253
