Title :
Integrated-optic ring resonators with two stacked layers of silica waveguide on Si
Author :
Suzuki, Senichi ; Shuto, Keizo ; Hibino, Yoshinori
Author_Institution :
NTT Opto-electron. Lab., Ibaraki, Japan
Abstract :
A ring resonator with a radius of 1.5 mm is demonstrated using a stack structure consisting of two layers of GeO/sub 2/-doped silica waveguide with different refractive index differences ( Delta ). One is a high- Delta waveguide layer with a Delta of 2% for a small-radius ring and the other is a waveguide layer with a Delta of 0.75% for good fiber coupling. The waveguides and a flattened middle-cladding layer are stacked on a Si substrate. The ring resonator exhibited a wide free spectral range (FSR) of 21.6+or-0.1 GHz and a high finesse of 110+or-10.<>
Keywords :
germanium compounds; integrated optics; optical resonators; optical waveguides; refractive index; silicon compounds; 1.5 mm; CVD; GeO/sub 2/-doped silica waveguide; Si; Si substrate; SiO/sub 2/:GeO/sub 2/; electron cyclotron resonance chemical vapour deposition; flame hydrolysis; flattened middle-cladding layer; good fiber coupling; high finesse; integrated-optic ring resonators; planar waveguide fabrication; refractive index differences; silica waveguide; small-radius ring; stacked layers; waveguide layer; wide free spectral range; Coupling circuits; Frequency division multiplexing; Optical coupling; Optical fiber devices; Optical ring resonators; Optical waveguides; Planar waveguides; Programmable control; Refractive index; Silicon compounds;
Journal_Title :
Photonics Technology Letters, IEEE
