A comparison of Nd:YAG fundamental and second-harmonic Q-switched laser-beam lifetime doping in single-crystal silicon

Silicon devices including bipolar transistors, junction diodes, and MOS capacitors were scanned by a -switched Nd:YAG (1.06 µm) and frequency-doubled Nd:YAG (0.53 µm) radiations under various conditions. The electrical characteristics of these devices were measured before and after scanning and again after thermal annealing. The data includes transistor gain versus laser power; junction diode leakage current versus junction depth; MOS lifetime versus laser power and the effects of subsequent thermal anneals on all of these. The results are that bulk minority-carrier lifetime decreases of several orders of magnitude will be produced by either of these radiations at peak power levels below those which will produce any visible surface damage. The changes in minority-carrier lifetime are stable for post scanning thermal anneals up to 400°C and are almost completely removed from an 800°C anneal. The depths within which minority-carrier lifetime changes significantly are 0.7 and 1.8 µm for 0.53- and 1.06-µm wavelength laser radiations, respectively. The results indicate that the recombination centers produced by the scanning are point defects and their density decreases exponentially with the distance into the silicon. The average power thresholds for point defect production (for both 0.53- and 1.06-µm wavelengths) were determined and are observed to increase with increased laser wavelength and pulse width. Potential applications in silicon devices and integrated circuits such as selective lifetime doping, β trimming, and selective-link making without passivation damage are possible.