Title :
Laser processing of polyimide films
Author :
Ray, Sambaran ; Perry, Philip ; Hodgson, Robert
Author_Institution :
IBM General Tech., NY, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Absorption; Chemical lasers; Chemical technology; Circuit testing; Laser excitation; Optical materials; Polyimides; Silicon; Solid lasers; Tunable circuits and devices;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070985
