DocumentCode
1087028
Title
Latchup prevention using an N-well epi-CMOS process
Author
Holly, Patrick J. ; Akers, Lex A.
Author_Institution
Motorola, Inc., Mesa, AZ
Volume
30
Issue
10
fYear
1983
fDate
10/1/1983 12:00:00 AM
Firstpage
1403
Lastpage
1405
Abstract
A n-well epi-CMOS structure is described to reduce the latchup sensitivity of CMOS. Results demonstrate excellent latchup reduction.
Keywords
Acoustical engineering; Anisotropic magnetoresistance; Conductivity; Electron devices; Latches; Metallization; Plasma applications; Plasma temperature; Substrates; Wet etching;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21308
Filename
1483209
Link To Document