DocumentCode

1087393

Title

Applications of phase conjugation to photolithography

Author

Levenson, M. ; Chiang, Karen

Author_Institution

IBM Research Laboratory, San Jose, CA, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2546

Lastpage

2546

Keywords

Atom lasers; Atomic beams; Atomic measurements; Frequency; Interference; Laser excitation; Laser modes; Laser transitions; Lithography; Pump lasers;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1071023

Filename

1071023