Title :
Control of mode profiles in proton-diffused LiNbO/sub 3/ waveguides using self-aligned SiO/sub 2/ cladding
Author :
Son, Yung-Sung ; Lee, Hyung-Jae ; Shin, Sang-Yung
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
fDate :
3/1/1990 12:00:00 AM
Abstract :
Channel waveguides fabricated in LiNbO/sub 2/ by proton diffusion with a self-aligned SiO/sub 2/-cladding structure are discussed. Proton diffusion in width and depth directions is amenable to process parameters, so that it provides a simple method for control of mode profiles. Using this method, symmetric depth mode profiles and an aspect ratio of 1.15 at lambda =0.6328 mu m have been achieved for efficient fiber-to-waveguide coupling.<>
Keywords :
claddings; diffusion in solids; lithium compounds; optical waveguides; silicon compounds; 0.6328 micron; LiNbO/sub 3/; SiO/sub 2/; aspect ratio; channel waveguides; depth directions; efficient fiber-to-waveguide coupling; mode profile control; mode profiles; proton diffused waveguides; proton diffusion direction; self-aligned cladding; symmetric depth mode profiles; width directions; Annealing; Electrooptic devices; Insertion loss; Optical device fabrication; Optical fiber devices; Optical fiber polarization; Optical fibers; Optical waveguides; Protons; Refractive index;
Journal_Title :
Photonics Technology Letters, IEEE
