Title :
VB-2 vertically integrated CMOS devices built on laser recrystallized polysilicon films
fDate :
11/1/1983 12:00:00 AM
Keywords :
CMOS process; CMOS technology; Circuit testing; Inverters; Isolation technology; MOS devices; Resistors; Silicon; Substrates; Subthreshold current;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21398
