Title :
VB-5 fully isolated lateral bipolar/MOS transistors fabricated in zone-melting-recrystallized Si films on SiO2
Author :
Silversmith, D.J. ; Fan, J.C.C. ; Mountain, R.W.
fDate :
11/1/1983 12:00:00 AM
Keywords :
Bipolar transistors; Doping; Fabrication; Implants; Isolation technology; Laboratories; MOS devices; MOSFET circuits; Semiconductor films; Silicon on insulator technology;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21401
