DocumentCode
1088152
Title
VB-5 fully isolated lateral bipolar/MOS transistors fabricated in zone-melting-recrystallized Si films on SiO2
Author
Silversmith, D.J. ; Fan, J.C.C. ; Mountain, R.W.
Volume
30
Issue
11
fYear
1983
fDate
11/1/1983 12:00:00 AM
Firstpage
1605
Lastpage
1606
Keywords
Bipolar transistors; Doping; Fabrication; Implants; Isolation technology; Laboratories; MOS devices; MOSFET circuits; Semiconductor films; Silicon on insulator technology;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21401
Filename
1483302
Link To Document