DocumentCode

1088314

Title

VIB-4 submicrometer laser-direct-write processing

Author

Ehrlich, D.J. ; Tsao, Jeffrey Y.

Volume

30

Issue

11

fYear

1983

fDate

11/1/1983 12:00:00 AM

Firstpage

1614

Lastpage

1615

Keywords

Diode lasers; Etching; Heterojunctions; Laboratories; Optical device fabrication; Solid lasers; Solid state circuits; Spatial resolution; Substrates; Writing;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1983.21415

Filename

1483316