A dynamic RAM Cell in recrystallized polysilicon

A new, one-transistor, dynamic RAM cell has been fabricated in beam-recrystallized polysilicon. Placing thin oxides both above and below the storage region doubles the storage capacitance. Complete isolation of the storage region by oxides also reduces the susceptibility of the cell to soft errors from collection of charge injected into the substrate by the surrounding elements or by alpha particles. Long storage times are feasible, being limited only by the leakage of the access transistor. A thick oxide under the bit line reduces the bit-line capacitance, further increasing the ratio of storage capacitance to bit-line capacitance.