Comparison of Techniques for Microwave Characterization of BST Thin Films

Author

Suherman, Phe M. ; Jackson, Timothy J. ; Lancaster, Michael J.

Author_Institution

Sch. of Electron., Electr., & Comput. Eng., Univ. of Birmingham

Volume

55

Issue

2

fYear

2007

Firstpage

397

Lastpage

401

Abstract

Various techniques involving coplanar waveguide transmission lines, coplanar resonators, and interdigital capacitors, have been employed to characterize the dielectric properties of Ba_0.05Sr_0.95TiO₃ thin films at cryogenic conditions. The devices were patterned from a high-temperature superconductor deposited on top of a single Ba_0.05Sr_0.95TiO₃ thin film. The measurements from these various techniques show a good agreement

Keywords

barium alloys; coplanar waveguide components; dielectric thin films; high-temperature superconductors; semiconductor thin films; strontium alloys; thin film devices; titanium alloys; BST thin films; Ba_0.05Sr_0.95TiO₃; coplanar resonators; coplanar waveguide transmission lines; cryogenic conditions; dielectric properties; high-temperature superconductor; interdigital capacitors; microwave characterization; Binary search trees; Capacitors; Coplanar transmission lines; Coplanar waveguides; Dielectric thin films; Microwave theory and techniques; Strontium; Superconducting thin films; Superconducting transmission lines; Transistors; Barium–strontium–titanate (BST); coplanar resonator (CPR); coplanar waveguide (CPW); interdigital capacitor (IDC);

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2006.889350

Filename

4084850