DocumentCode
1089003
Title
Glow discharge processes; Sputtering and plasma etching
Author
Ferrar, C.
Author_Institution
United Aircraft Research Labs., East Harford, CT, USA
Volume
17
Issue
5
fYear
1981
fDate
5/1/1981 12:00:00 AM
Firstpage
817
Lastpage
817
Keywords
Book reviews; Glow discharges; Plasma materials processing; Sputtering; Books; Glow discharges; Magnetic materials; Mathematics; Plasma applications; Plasma chemistry; Plasma materials processing; Radio frequency; Sputter etching; Sputtering;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1981.1071175
Filename
1071175
Link To Document