• DocumentCode
    1089099
  • Title

    A PtSi Schottky-barrier area imager with meander-channel CCD readout registers

  • Author

    Tanikawa, K. ; Ito, Y. ; Shimohashi, A.

  • Author_Institution
    Fujitsu Laboratories Ltd., Kobe, Japan
  • Volume
    4
  • Issue
    3
  • fYear
    1983
  • fDate
    3/1/1983 12:00:00 AM
  • Firstpage
    66
  • Lastpage
    67
  • Abstract
    This paper describes improvement of the fill factor of Schottky-barrier infrared CCD arrays by using a meander-channel CCD (MCCD) as both the vertical and the horizontal readout registers. A 64 × 64 element monolithic Schottky-barrier infrared meander channel CCD(SB-IRMCCD) with 23 percent fill factor has been fabricated with negligible element to element cross talk. This letter also describes how a fill factor of 57 percent is possible by decreasing the area of the vertical MCCD register to 30 percent of that in the present device.
  • Keywords
    Charge coupled devices; Detectors; Electrodes; Indium tin oxide; Infrared image sensors; Infrared imaging; Integrated circuit technology; Registers; Sensor arrays; Silicon;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1983.25650
  • Filename
    1483394
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1089099