DocumentCode :
1089099
Title :
A PtSi Schottky-barrier area imager with meander-channel CCD readout registers
Author :
Tanikawa, K. ; Ito, Y. ; Shimohashi, A.
Author_Institution :
Fujitsu Laboratories Ltd., Kobe, Japan
Volume :
4
Issue :
3
fYear :
1983
fDate :
3/1/1983 12:00:00 AM
Firstpage :
66
Lastpage :
67
Abstract :
This paper describes improvement of the fill factor of Schottky-barrier infrared CCD arrays by using a meander-channel CCD (MCCD) as both the vertical and the horizontal readout registers. A 64 × 64 element monolithic Schottky-barrier infrared meander channel CCD(SB-IRMCCD) with 23 percent fill factor has been fabricated with negligible element to element cross talk. This letter also describes how a fill factor of 57 percent is possible by decreasing the area of the vertical MCCD register to 30 percent of that in the present device.
Keywords :
Charge coupled devices; Detectors; Electrodes; Indium tin oxide; Infrared image sensors; Infrared imaging; Integrated circuit technology; Registers; Sensor arrays; Silicon;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/EDL.1983.25650
Filename :
1483394
Link To Document :
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