DocumentCode :
1089692
Title :
Deformation Measurements of High-Speed MEMS With Combined Two-Wavelength Single-Pulse Digital Holography and Single Phase Reconstruction Using Subpicosecond Pulses
Author :
Hansel, Thomas ; Grunwald, Ruediger ; Reimann, Klaus ; Bonitz, Jens ; Kaufmann, Christian ; Griebner, Uwe
Author_Institution :
Max Born Inst. for Nonlinear Opt. & Short Pulse Spectrosc., Berlin, Germany
Volume :
15
Issue :
5
fYear :
2009
Firstpage :
1351
Lastpage :
1358
Abstract :
Holographic contouring of high-speed microelectromechanical system optical scanner mirrors operating at resonance frequencies close to 1 kHz is performed with ultrashort-pulse lasers containing two spectral components. These particular pulses are obtained by shaping the spectrum of sub-30 fs pulses of a Ti:sapphire laser system by an acousto-optic programmable dispersive filter. The separation of the two spectral components is adjustable within the 50-nm gain bandwidth. Single-pulse dual-wavelength contouring is achieved by an extended Twyman-Green type interferometer including two CMOS cameras. The deformation obtained from a single-wavelength interferogram is combined with the coarse-shape information deduced from the phase difference map of the two interferograms captured at different wavelengths to yield a combined reconstruction.
Keywords :
CMOS image sensors; acousto-optical filters; high-speed optical techniques; holographic interferometry; holography; mechanical variables measurement; micro-optomechanical devices; mirrors; optical scanners; Al2O3:Ti; CMOS cameras; Ti-sapphire laser; acousto-optic programmable dispersive filter; deformation measurements; extended Twyman-Green type interferometer; high-speed MEMS; high-speed microelectromechanical system; holographic contouring; optical scanner mirrors; phase difference map; resonance frequencies; single phase reconstruction; single-pulse dual-wavelength contouring; single-wavelength interferogram; subpicosecond pulses; time 30 fs; two-wavelength single-pulse digital holography; ultrashort-pulse lasers; Digital holographic interferometry; digital holography; multiplex holography; phase measurement;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2009.2017032
Filename :
5089472
Link To Document :
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