A lateral metal—insulator—p-Si tunnel transistor

We report the fabrication of a lateral MIS tunnel transistor whose emitter and collector are Al/SiO2/p-Si tunnel junctions. All processing is carried out at room temperature except for the growth of the passivating field oxide. The small signal common emitter current gain is 20. Two coupled gain mechanisms exist for such a lateral MIS tunnel transistor. The first mechanism relies on a high minority-carrier injection ratio of the emitter junction. Second, the minority carriers injected into the reverse-biased collector junction may produce additional gain through multiplication of majority-carrier current. Lateral MIS tunnel transistors on n-Si make use of the second mechanism. Our device takes advantage of the high minority-carrier injection ratio achievable with Al/SiO2/p-Si tunnel junctions.