Phononic crystals based on LiNbO3 realized using domain inversion by electron-beam irradiation

We report in this paper about the realization of domain inversion in z-cut lithium niobate by electron beam irradiation in order to perform phononic crystals. The fabrication of these phononic crystals on z-cut LiNbO₃, which is, in our case, a periodic repetition of voids and LiNbO₃, was achieved by domain inversion followed by wet etching, taking advantage of the large difference in etching rate between z+ and z- faces. A pertinent choice of irradiation conditions such as accelerating voltage, beam current, and charge density was determined and optimized. Two-dimensional structures at the micrometer scale were then realized on z-cut LiNbO₃. We demonstrate the achievement of hexagons with diameters between 2 mum and 18 mum, with a very important depth close to 30 mum, which depends on the etching time and the hole size. The obtained structures, which exhibit a filling fraction varying from 1% to 64%, were characterized before etching by polarizing microscope to visualize the inverted domains. After HF etching, scanning electron microscopy was used to observe the obtained phononic structures. Taking into account the obtained filling fraction values and the size of created hexagons, the frequency band gap of these structures is expected at a range of 200 to 350 MHz. As expected in this frequency range, we have proven experimentally the existence of the phononic band gap on z-cut LiNbO₃ by combination of a realized phononic crystal with a surface acoustic wave (SAW) device.