Title :
Comments on "Prototype SECS message service for communication in the semiconductor manufacturing environment
Author :
Baratz, J.M. ; Birchak, J. ; Vallino, James R.
Author_Institution :
Digital Equip. Corp., Marlborough, MA, USA
Abstract :
For the original article see ibid., vol.2, no.4, p.165-77 (1989). The commenters note that the final SMS (SECS message service) documents contain editorial and nomenclature differences from the prototype protocol described in the above-named work by J.R. Moyne and L.C. McAfee Jr. These differences are summarized as follows: (1) the new documents adhere more closely to ISO style conventions for documentation; (2) the Service Document introduces formal models for the services; (3) the Service and Protocol were aligned to be similar to ISO 9506, MMS; and (4) the Protocol was specified using Abstract Syntax One notation, ISO 8824.<>
Keywords :
electronic messaging; integrated circuit manufacture; open systems; protocols; semiconductor device manufacture; standards; Abstract Syntax One notation; ISO 8824; ISO style conventions; SECS message service; bidirectional protocol; data communication; documentation; semiconductor manufacturing environment; Etching; Message service; Plasma applications; Plasma properties; Protocols; Prototypes; Semiconductor device manufacture; Semiconductor materials; Software prototyping;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
