DocumentCode
1091109
Title
IEEE copyright form
Volume
20
Issue
1
fYear
2007
Firstpage
55
Lastpage
56
Abstract
Authors must enclose a signed copy of this form when submitting manuscripts to the Editor of this publication.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2007.892049
Filename
4089015
Link To Document