Title :
An analog technology integrates bipolar, CMOS, and high-voltage DMOS transistors
Author :
Krishna, Surinder ; Kuo, James ; Gaeta, Isaura Servin
Author_Institution :
Fairchild Semiconductor, Mountain View, CA
fDate :
1/1/1984 12:00:00 AM
Abstract :
This paper describes the development of an analog technology that integrates bipolar, CMOS, and DMOS transistors on a single chip. The architecture of the process was chosen for its simplicity and versatility. The influence of the process variables and trade-offs in the performance of the devices have been outlined. Some key elements of DMOS and bipolar transistor behavior are discussed. The successful application of the technology to a plasma display driver has been demonstrated.
Keywords :
Bipolar transistors; Boron; CMOS logic circuits; CMOS process; CMOS technology; Circuit noise; Driver circuits; Implants; MOS devices; Plasma displays;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21479