DocumentCode :
1091283
Title :
A novel deposit/spin waveguide interconnection (DSWI) for semiconductor integrated optics
Author :
Furuya, Kazuhito ; Miller, Barry I. ; Coldren, Larry A. ; Howard, Richard E.
Author_Institution :
Tokyo Institute of Technology, Tokyo, Japan
Volume :
18
Issue :
10
fYear :
1982
fDate :
10/1/1982 12:00:00 AM
Firstpage :
1783
Lastpage :
1789
Abstract :
We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiOx ( 
) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.
) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.Keywords :
Coatings; Integrated circuit interconnections; Interconnections, Integrated circuits; Optical strip waveguides; Coatings; Integrated optics; Optical device fabrication; Optical interconnections; Optical materials; Optical waveguides; Semiconductor lasers; Semiconductor materials; Semiconductor waveguides; Waveguide lasers;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.1982.1071396
Filename :
1071396
Link To Document :
