• DocumentCode
    1091825
  • Title

    Measurement of diffusion length, lifetime, and surface recombination velocity in thin semiconductor layers

  • Author

    Gonzalez, Franklin N. ; Neugroschel, Arnost

  • Author_Institution
    Harris Corporation, Melbourne, FL
  • Volume
    31
  • Issue
    4
  • fYear
    1984
  • fDate
    4/1/1984 12:00:00 AM
  • Firstpage
    413
  • Lastpage
    416
  • Abstract
    A small-signal admittance method is developed for the determination of two important parameters affecting the performance of several semiconductor devices with thin layers such as I2L and MOS transistors, OCI-HLE, BSF and TJ solar cells. These parameters, the minority-carrier diffusion length (or the minority-carrier lifetime) and the surface recombination velocity, are found using a combination of low-frequency and high-frequency admittance measurements. The theoretical base of the method and experimental results showing its application and usefulness are presented.
  • Keywords
    Admittance measurement; Current measurement; Length measurement; MOSFETs; Photovoltaic cells; Radiative recombination; Semiconductor devices; Substrates; Velocity measurement; Yield estimation;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1984.21542
  • Filename
    1483827