The MMST computer-integrated manufacturing system framework

Computer-integrated manufacturing (CIM) is the harmonious connection, integration, and interoperation of automation equipment within a manufacturing facility. In a semiconductor wafer fab, this includes integration of the processing equipment with all of the supporting systems for product and process specification, production planning and scheduling, and material handling and tracking. Traditionally, CIM systems have been characterized as monolithic mainframe-based systems and/or inflexible islands of automation with limited interoperability. Today´s manufacturing demands fully integrated dynamic systems which directly support the concepts of lean, flexible and agile manufacturing to high quality standards. These requirements drove the design of a new CIM system which was developed for the Microelectronics Manufacturing Science and Technology (MMST) program. This paper provides an overview of the MMST CIM system framework which is based on open distributed system and object technologies. The CIM system was demonstrated in a 1000 wafer pilot production run in 1993 which achieved world record cycle time, and is now being commercialized as part of the WORKS product family from Texas Instruments