Architecture and overview of MMST machine control [semiconductor manufacturing facilities]

Author

Beaver, Richard ; Coleman, Andy ; Draheim, Dennis ; Hoffman, Andy

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

Volume

7

Issue

2

fYear

1994

fDate

5/1/1994 12:00:00 AM

Firstpage

127

Lastpage

133

Abstract

This article describes the configurable MMST (Microelectronics Manufacturing Science and Technology) machine control architecture. The architecture has been developed to allow for quick insertion into current fabrication facilities while also allowing for a complete bottoms-up implementation of the machine control software. The MMST machine control is specifically designed to work with the next generation of vacuum-processing cluster tools currently under development by semiconductor equipment vendors and provides a windows based, graphical control panel for the equipment user

Keywords

computer integrated manufacturing; integrated circuit manufacture; semiconductor device manufacture; MMST machine control; configurable architecture; fabrication facilities; semiconductor processing equipment; vacuum-processing cluster tools; windows based graphical control panel; Computer architecture; Computer integrated manufacturing; Costs; Fabrication; Machine control; Microelectronics; Process control; Production facilities; Remote monitoring; Topology;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.286849

Filename

286849