Title :
Preparation of a clean GaAs
Author :
Sinharoy, Samar ; Hoffman, Ryan A. ; Hoffman, Richard A.
Author_Institution :
Westinghouse R&D Center, Pittsburgh, PA
fDate :
8/1/1984 12:00:00 AM
Abstract :
We describe a procedure for producing a clean surface of GaAs
Keywords :
Argon; Diffraction; Electrons; Face detection; Gallium arsenide; Spectroscopy; Substrates; Surface cleaning; Surface reconstruction; Surface treatment;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21667
