Title :
Czochralski silicon
Author :
Thomas, Robert C.
Author_Institution :
Systonics, Inc., Winchester, MA
fDate :
11/1/1984 12:00:00 AM
Abstract :
When silicon technology was new there were effects and observations which went unused or unrecognized in the rush to get products to market. This paper covers one such set of observations in silicon crystal growth. It has been abstracted from a historical perspective of silicon processing being compiled for family and associates from the experiences of the author.
Keywords :
Germanium; Gold; Impurities; Iron; Laboratories; Manganese; Physics; Silicon; Solid state circuits; Temperature measurement;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21750
