DocumentCode
1094091
Title
Czochralski silicon
Author
Thomas, Robert C.
Author_Institution
Systonics, Inc., Winchester, MA
Volume
31
Issue
11
fYear
1984
fDate
11/1/1984 12:00:00 AM
Firstpage
1547
Lastpage
1549
Abstract
When silicon technology was new there were effects and observations which went unused or unrecognized in the rush to get products to market. This paper covers one such set of observations in silicon crystal growth. It has been abstracted from a historical perspective of silicon processing being compiled for family and associates from the experiences of the author.
Keywords
Germanium; Gold; Impurities; Iron; Laboratories; Manganese; Physics; Silicon; Solid state circuits; Temperature measurement;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1984.21750
Filename
1484035
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