DocumentCode :
1095032
Title :
Fast and slow border traps in MOS devices
Author :
Fleetwood, D.M.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Volume :
43
Issue :
3
fYear :
1996
fDate :
6/1/1996 12:00:00 AM
Firstpage :
779
Lastpage :
786
Abstract :
Convergent lines of evidence are reviewed which show that near-interfacial oxide traps (border traps) that exchange charge with the Si can strongly affect the performance, radiation response, and long-term reliability of MOS devices. Observable effects of border traps include capacitance-voltage (C-V) hysteresis, enhanced 1/f noise, compensation of trapped holes, and increased thermally stimulated current in MOS capacitors. Effects of faster (switching times between ≈10-6 s and ≈1 s) and slower (switching times greater than ≈1 s) border traps have been resolved via a dual-transistor technique. In conjunction with studies of MOS electrical response, electron paramagnetic resonance and spin dependent recombination studies suggest that E´ defects (trivalent Si centers in SiO2 associated with O vacancies) can function as border traps in MOS devices exposed to ionizing radiation or high-field stress. Hydrogen-related centers may also be border traps
Keywords :
1/f noise; MIS devices; electron traps; electron-hole recombination; paramagnetic resonance; semiconductor device noise; semiconductor device reliability; thermally stimulated currents; 1/f noise; E´ defects; MOS capacitors; MOS devices; Si-SiO2; capacitance-voltage hysteresis; dual-transistor technique; electrical response; electron paramagnetic resonance; fast border traps; high-field stress; hole compensation; hydrogen-related centers; ionizing radiation response; oxygen vacancies; reliability; slow border traps; spin dependent recombination; switching times; thermally stimulated current; Capacitance-voltage characteristics; Charge measurement; Current measurement; Electric variables measurement; Electron traps; Frequency; MOS devices; Noise measurement; Switches; Time measurement;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/23.510713
Filename :
510713
Link To Document :
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