Title :
Laser microchemical techniques for reversible restructuring of gate-array prototype circuits
Author :
Ehrlich, D.J. ; Tsao, J.Y. ; Silversmith, D.J. ; Sedlacek, J.H.C. ; Mountain, R.W. ; Graber, W.S.
Author_Institution :
Massachusetts Institute of Technology, Lexington, MA
fDate :
2/1/1984 12:00:00 AM
Abstract :
Laser direct-write Al etching and poly-Si deposition have been adapted to the mask-free alteration of simple gate-array test circuits. Simple test structures on commercial CMOS chips have been reconfigured with no degradation in device or circuit performance. These new methods may be useful for rapid evaluation and optimization of integrated-circuit prototypes.
Keywords :
Chemical lasers; Circuit testing; Etching; Integrated circuit interconnections; Laser beams; Laser modes; Optical device fabrication; Optical refraction; Prototypes; Writing;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25822