Title :
Characteristics of an all-implanted p+-n-n+solar cell
Author :
Silard, A. ; Marinescu, R.
Author_Institution :
Polytechnic Institute, Bucharest, Romania
fDate :
3/1/1984 12:00:00 AM
Abstract :
This work presents the main electrooptical parameters of a p+-n-n+single-crystalline silicon solar cell, whose front p+-n junction and the backside n-n+contact were fabricated through masked ion implantation of boron (11B+) and phosphorus (31p+), respectively. The distinctive feature of the cells consists of the use of the front junction silicon dioxide mask as an AR layer in the finished devices.
Keywords :
Annealing; Atomic layer deposition; Boron; Coatings; Fabrication; Implants; Impurities; Ion implantation; Photovoltaic cells; Silicon compounds;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25835